3-D Micromachining with TIEGA Process
نویسندگان
چکیده
منابع مشابه
Excimer laser micromachining with half-tone masks for the fabrication of 3-D microstructures - Science, Measurement and Technology, IEE Proceedings-
Excimer laser micromachining by mask projection with half-tone masks has been used to define deep structures with complex surface profiles in cross-linked SU-8 photoresist. A simple algorithm has been developed to derive the required mask transmission function given the material etch characteristics and the desired surface profile. This algorithm has been shown to give reasonable profile accura...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines
سال: 2000
ISSN: 1341-8939,1347-5525
DOI: 10.1541/ieejsmas.120.375